mass flow meters controllers  (Bronkhorst High Tech)

Journal: Science Advances

Article Title: Single 5-centimeter-aperture metalens enabled intelligent lightweight mid-infrared thermographic camera

doi: 10.1126/sciadv.ado4847

Figure Lengend Snippet: ( A to I ) Snapshots of three frames from a gas leak detection video sequence (movie S4), with the GCD color-map superimposed onto visible light images (A, D, and G) and IR thermal images (B, E, and H), respectively. (C), (F), and (I) are the pixel-by-pixel estimates of the flow velocities (blue arrows) superimposed onto a GCD image. The concentric squares indicate boundaries at which the gas flow is evaluated. The detection distance is 1.2 m and the temperature difference between the gas and background (hotplate) Δ T is 78.3 K. Three frames are at the time when the actual leak rates are 0.2 (A to C), 0.4 (D to F), and 0.6 sccm (G to I), respectively. ( J ) The time-resolved leak-rate estimate (red line) from the video sequence, compared with the ground-truth (blue line) from the mass flow controller. ( K ) The time-resolved relative error (difference between estimated leak rate and ground-truth) (blue line). The horizontal red dashed line indicates the overall mean relative error of 35.6%. Results at Δ T of 38.3 K, the distance of 2.5 and 5 m, and lower leak rates are shown in figs. S24 to S28 and movies S5 to S9. All results are summarized in .

Article Snippet: The gas flow rate was precisely controlled by a mass flow meter and controller (Sevenstar, CS200C).

Techniques: Sequencing